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Home / List of Sensor Manufacturers / Spectral Interference Displacement Sensors
Sensor Makers / List of Sensor Manufacturers
Manufacturers of Spectral Interference Displacement Sensors
A spectral interference displacement sensor shines light with a broad range of wavelengths, separates the interference of the reflected light by wavelength and analyzes it to measure distance and thickness in fine detail. It is used to measure the thickness of film and glass and for precise displacement measurement.
- Companies listed
- 23 companies (Japan and overseas)
- How it works
- Official Handbook, Lesson 29
- Relation to the exam
- Covered by the Practical Sensor Certification exam
Japan7 companies
| Company | Headquarters | Product verified | Method |
|---|---|---|---|
| JFEテクノリサーチ株式会社 | Japan | FiDiCa | Spectral interference |
| santec株式会社 | Japan | TMS-2000 | Swept-wavelength interference |
| 株式会社SCREENセミコンダクターソリューションズ | Japan | VM-1200、VM-1300、VM-2500、VM-3500 | Spectral reflectance (film thickness) |
| 株式会社キーエンス | Japan | SI-F、SI-T | Spectral interference |
| 株式会社ニレコ | Japan | BFS | Optical heterodyne |
| 大塚電子株式会社 | Japan | SF-3、組込み型膜厚モニター、ラインスキャン膜厚計 | Spectral interference |
| 浜松ホトニクス株式会社 | Japan | Optical MicroGauge、Multipoint NanoGauge | — |
Asia2 companies
| Company | Headquarters | Product verified | Method |
|---|---|---|---|
| LightE-Technology（深圳立仪科技） | China | METAFLIN-W | — |
| Suzhou Tronsight Intelligent Technology（苏州创视智能技术） | China | TS-I | Spectral interference |
Europe3 companies
| Company | Headquarters | Product verified | Method |
|---|---|---|---|
| Micro-Epsilon Messtechnik GmbH & Co. KG | Germany | interferoMETER | — |
| Precitec | Germany | CHRocodile | — |
| ThetaMetrisis | Greece | FR-ES、FR-Mini、FR-Pro、FR-Scanner、FR-InLine | Spectral reflectance (film thickness) |
The Americas11 companies
| Company | Headquarters | Product verified | Method |
|---|---|---|---|
| Aeva | United States | Eve 1D | Optical heterodyne |
| Angstrom Sun Technologies | United States | SR Series、TFProbe | Spectral reflectance (film thickness) |
| Bristol Instruments | United States | 157 Series、137 Series | — |
| Bruker | United States | FilmTek | — |
| IPG Photonics | United States | LDD-700 | — |
| KLA Corporation | United States | Filmetrics | Spectral reflectance (film thickness) |
| Lumetrics, Inc. | United States | OptiGauge、LUMOS-V、STMS | — |
| Novacam Technologies | Canada | MICROCAM | — |
| Semiconsoft | United States | MProbe | — |
| Sensory Analytics（SpecMetrix） | United States | SpecMetrix | Spectral interference |
| StellarNet | United States | 膜厚計測システム | Spectral reflectance (film thickness) |
Listing criteria
- Candidates are gathered widely, in Japan and overseas, from publicly available information such as trade show exhibitor information, information published by industry associations and product information websites. Of these, we list only manufacturers whose relevant products we were able to confirm on their official websites (trading companies and distributors are excluded).
- This list does not cover all manufacturers. To request a listing or a correction, please use the listing request and correction form.
- Within each region, companies are listed in no particular order; the order does not indicate any evaluation or recommendation.
- The list covers products built into production lines and equipment; it does not include dedicated measuring machines used in measurement rooms and the like, or hand-held measuring tools.
- Information checked on: October 14, 2026
- Company names and product names listed are trademarks or registered trademarks of the respective companies.